Energy Dispersive X-ray Spectroscopy (EDS) provides qualitative and quantitative elemental analysis with spatial resolution when integrated with SEM. It is used to assess compositional uniformity, phase distribution, and elemental segregation.
Image Source: (Captured by me, Electron Microscopy Center, University of Kentucky)
I used EDS to verify elemental composition before and after thermal processing of thin films. This enabled confirmation of selective removal of sacrificial elements while retaining refractory alloy constituents. Compositional analysis ensured that processing outcomes matched design intent.
I employed EDS mapping to quantify compositional variation in combinatorial thin-film libraries and to assess elemental homogeneity in bulk alloys. Spatially resolved analysis supported correlation between local chemistry and measured properties. Multiple instruments were used to cross-validate compositional data.
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