High-vacuum systems provide a controlled, low-pressure environment (typically ~10⁻⁶–10⁻⁸ Torr) essential for thin-film deposition and thermal processing. A typical system includes a vacuum chamber, roughing and turbomolecular pumps, pressure gauges, valves, gas inlets, and electrical and thermal feedthroughs for precise control of atmosphere and temperature.
Image Source: (Captured by me, Balk Lab, University of Kentucky)
I operated high-vacuum systems to enable contamination-free deposition and thermal processing of refractory alloy thin films. Base pressures on the order of 10⁻⁸ Torr were maintained during deposition, while vacuum levels below 10⁻⁶–10⁻⁷ Torr were used during in-situ thermal dealloying to selectively remove sacrificial elements and preserve alloy integrity.
I used high-vacuum environments to ensure reproducible deposition and annealing of multicomponent alloy thin films. Maintaining low oxygen partial pressure during deposition and post-deposition heat treatments enabled reliable assessment of intrinsic phase stability and mechanical behavior.
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